用過的 FUJI CP 643E (PLACEMENT MACHINES) 出售
Configuration 配置
1. TSK UF3000EX- Full-Automatic Prober
Auto loader
GPIB interface
Self-calibration system
Auto Needle Alignment
Auto Needle Height
Auto pad alignment unit
LCD Display (15 in)
Real Time wafer map display
Multi-site probing function 3-64 dies
Needle Cleaning
Probe Card Holder, RTGR-48
Chuck Type : Nickal12 inch
Offline ink function
Ink check function
Inker device (OPTIONAL)
Needle Inspection
Profiler Sensor
Configuration data
UF200A PROBER SPECIFICATIONS 技术指标
1.Power source:
(1)Voltage:AC 220±20V
(2)Consumption: Approximately 3kVA
2.Overall Size:1487W x 1622mm x 967H mm
3.Weight:1650kg (Standard)
4. Mechanical I/F with tester:Rectangular Prober card (cable end type)
5. Total Accuracy:±2µm
6.Acceptable wafer dimensions
(1)wafer diameter:Diameter of5",6",8"and12"
(2)thickness:200-1000um
(3)thickness variation:Less than ±50um
7. Max tested die numbers:UF3000EX : 250K DIES
8.Air supply
(1)Pressure:0.4 MPa or more
9.Vacuum supply:Less than 50kPa, 30 liters/minute
10.X/Y axes
(1)Probing area:±170mm
(2)Max Speed:500mm/s
(3)Resolution:0.5um
11.Z axis
(1)Full stroke:37mm
(2)Max Speed:30mm/sec
(3)Resolution:3.75um
12. Chuck Z control
(1)Control accuracy:±2um
(2)Overtravel:0~500um
(3)0axis Rotation Range:±4°
(4)Resolution:0.00028°
(5)Fine Alignment:CCD ITV Image Processing
13. Hard Disk Drive
(1)Capacity:40G byte or more
(2)Number of drive:1drive
14. Floppy Disk Drive
(1)Disk nominal size:3.5 inches
(2)Number of drive:1drive
15. USB interface: use of external memory possible
16.Display: 15 inch TFT high color LCD